Throughout the century-long history of electron microscopy instrumentation, in terms of their resolving power significant progress has been achieved. However, despite all incredible efforts, the result is a highly complex and expensive systems.

MEMS electron optics holds promise as a solution for this dilemma, but it has not yet to fully meet expectations. This is largely due to the limitations of current conventional MEMS technology as applied to electron microscopy instrumentation. These limitations have diminished its value, preventing the realization of its full potential. We aim to address current challenges and open up entirely new possibilities.